Product Profile of Silicon Micromachined Capacitive Sensors
Teknic is the manufacturer of Silicon Micromachined Capacitive Sensors. Teknic is an ISO 9001: 2000 certified company. The Silicon Micromachined Capacitive Sensors is designed with capacitive sensors. The small dimensions, rugged construction and excellent reliability makes it especially suitable for unattended free-field instruments and instrumentation of structures, such as nuclear power plants, dams and seismic alerting systems.
Specifications of Silicon Micromachined Capacitive Sensors are:
Offset [at 0g] 2.5 V ? 200 ?V/ degree C
Cross axis sensitivity 0.030 V/g
Hysteresis none
Noise typ. 10 ?V/?Hz
Orientation triaxial, horizontal [floor] mounting or vertical [wall] mounting
Non-Linearity less than 0.5 percent of full scale
Frequency response linear 0 to 150 Hz [accuracy ?1percent]
Dynamic range [RMS] > 84 dB [DC to 50 Hz]
Shock survival 6000 g [0.5 ms half sine]
Vibration survival 20 g RMS [random noise 20-500 Hz, 30 minutes]
Operating temperature - 30 to 70 degree C
